Nanometrology, Optics and Laser-Based Measurements, Development of Measurement Standard, Measurement for Industrial Purposes, Measurement System Control Automation, Metrology in Chemistry

Author Details

Rahman, Ardi, Puslit Metrologi LIPI, Indonesia

  • Vol 42, No 2 (2018) - Artikel
    Characterization of 1D Grating Standard for National Laboratory Comparison Using Scanning Electron Microscope
    Abstract  PDF